By Robert W. Johnstone,Ash Parmaswaran

ISBN-10: 1402080204

ISBN-13: 9781402080203

ISBN-10: 1475710771

ISBN-13: 9781475710779

An creation to Surface-Micromachining offers for the 1st time a unified view of surface-micromachining. build up from the elemental development block of microfabrication concepts, to the overall surface-micromachining layout, it is going to end with the speculation and layout of concrete elements. An advent to Surface-Micromachining connects the producing procedure, microscale phenomena, and layout info to actual shape and serve as.
This publication may be of curiosity to mechanical engineers trying to scale back into micromachining and microelectronics designers seeking to circulation horizontally to micromachining.

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An Introduction to Surface-Micromachining by Robert W. Johnstone,Ash Parmaswaran

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